Pulse mode effects on crystallization temperature of titanium dioxide films in pulse magnetron sputtering

Takahira Miyagi, Masayuki Kamei, Tomoyuki Ogawa, Takefumi Mitsuhashi, Atsushi Yamazaki, Tetsuya Sato

Research output: Contribution to journalConference articlepeer-review

30 Citations (Scopus)

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Engineering & Materials Science

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Chemical Compounds