Abstract
Point spread functions (PSF) of some kinds of x-ray imaging detectors are directly measured using x-ray microbeam. The experiment has been performed at bending magnet beamline BL20B2 and undulator beamline BL20XU of SPring-8. The microbeam is focused using a Fresnel zone plate (FZP) with coherent illumination to 0.3 μm (almost outermost zone width of the FZP). The imaging detectors are put at the focal plane and directly detect the microbeam. Two types of high spatial resolving detectors are tested. One is x-ray-electron conversion type with electro-magnetic lens, and spatial resolution is estimated to 0.7 μm. The other is x-ray-visible light conversion type with optical lens and the spatial resolution is estimated to 1.0 μm.
Original language | English |
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Pages (from-to) | 126-133 |
Number of pages | 8 |
Journal | Proceedings of SPIE - The International Society for Optical Engineering |
Volume | 4499 |
DOIs | |
Publication status | Published - 2001 Jan 1 |
Externally published | Yes |
Keywords
- FZP
- Point spread function
- SPring-8
- X-ray imaging detector
- X-ray microbeam
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Computer Science Applications
- Applied Mathematics
- Electrical and Electronic Engineering