PSF measurement of imaging detectors with an X-ray microbeam

Hidekazu Takano, Yoshio Suzuki, Kentaro Uesugi, Akihisa Takeuchi, Naoto Yagi

Research output: Contribution to journalArticlepeer-review

25 Citations (Scopus)

Abstract

Point spread functions (PSF) of some kinds of x-ray imaging detectors are directly measured using x-ray microbeam. The experiment has been performed at bending magnet beamline BL20B2 and undulator beamline BL20XU of SPring-8. The microbeam is focused using a Fresnel zone plate (FZP) with coherent illumination to 0.3 μm (almost outermost zone width of the FZP). The imaging detectors are put at the focal plane and directly detect the microbeam. Two types of high spatial resolving detectors are tested. One is x-ray-electron conversion type with electro-magnetic lens, and spatial resolution is estimated to 0.7 μm. The other is x-ray-visible light conversion type with optical lens and the spatial resolution is estimated to 1.0 μm.

Original languageEnglish
Pages (from-to)126-133
Number of pages8
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume4499
DOIs
Publication statusPublished - 2001 Jan 1
Externally publishedYes

Keywords

  • FZP
  • Point spread function
  • SPring-8
  • X-ray imaging detector
  • X-ray microbeam

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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