PSF measurement of imaging detectors with an X-ray microbeam

Hidekazu Takano; Yoshio Suzuki; Kentaro Uesugi; Akihisa Takeuchi; Naoto Yagi

doi:10.1117/12.450230

PSF measurement of imaging detectors with an X-ray microbeam

Hidekazu Takano, Yoshio Suzuki, Kentaro Uesugi, Akihisa Takeuchi, Naoto Yagi

Research output: Contribution to journal › Article › peer-review

25 Citations (Scopus)

Abstract

Point spread functions (PSF) of some kinds of x-ray imaging detectors are directly measured using x-ray microbeam. The experiment has been performed at bending magnet beamline BL20B2 and undulator beamline BL20XU of SPring-8. The microbeam is focused using a Fresnel zone plate (FZP) with coherent illumination to 0.3 μm (almost outermost zone width of the FZP). The imaging detectors are put at the focal plane and directly detect the microbeam. Two types of high spatial resolving detectors are tested. One is x-ray-electron conversion type with electro-magnetic lens, and spatial resolution is estimated to 0.7 μm. The other is x-ray-visible light conversion type with optical lens and the spatial resolution is estimated to 1.0 μm.

Original language	English
Pages (from-to)	126-133
Number of pages	8
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	4499
DOIs	https://doi.org/10.1117/12.450230
Publication status	Published - 2001 Jan 1
Externally published	Yes

Keywords

FZP
Point spread function
SPring-8
X-ray imaging detector
X-ray microbeam

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

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10.1117/12.450230

Cite this

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abstract = "Point spread functions (PSF) of some kinds of x-ray imaging detectors are directly measured using x-ray microbeam. The experiment has been performed at bending magnet beamline BL20B2 and undulator beamline BL20XU of SPring-8. The microbeam is focused using a Fresnel zone plate (FZP) with coherent illumination to 0.3 μm (almost outermost zone width of the FZP). The imaging detectors are put at the focal plane and directly detect the microbeam. Two types of high spatial resolving detectors are tested. One is x-ray-electron conversion type with electro-magnetic lens, and spatial resolution is estimated to 0.7 μm. The other is x-ray-visible light conversion type with optical lens and the spatial resolution is estimated to 1.0 μm.",

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author = "Hidekazu Takano and Yoshio Suzuki and Kentaro Uesugi and Akihisa Takeuchi and Naoto Yagi",

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AU - Takano, Hidekazu

AU - Suzuki, Yoshio

AU - Uesugi, Kentaro

AU - Takeuchi, Akihisa

AU - Yagi, Naoto

PY - 2001/1/1

Y1 - 2001/1/1

N2 - Point spread functions (PSF) of some kinds of x-ray imaging detectors are directly measured using x-ray microbeam. The experiment has been performed at bending magnet beamline BL20B2 and undulator beamline BL20XU of SPring-8. The microbeam is focused using a Fresnel zone plate (FZP) with coherent illumination to 0.3 μm (almost outermost zone width of the FZP). The imaging detectors are put at the focal plane and directly detect the microbeam. Two types of high spatial resolving detectors are tested. One is x-ray-electron conversion type with electro-magnetic lens, and spatial resolution is estimated to 0.7 μm. The other is x-ray-visible light conversion type with optical lens and the spatial resolution is estimated to 1.0 μm.

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KW - X-ray imaging detector

KW - X-ray microbeam

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PSF measurement of imaging detectors with an X-ray microbeam

Abstract

Keywords

ASJC Scopus subject areas

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