Prototype atomic force microscope system with micro-four-point probe for quantitative characterization of local electrical conductivity

Bingfeng Ju, Yang Ju, Masumi Saka

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)

Abstract

An atomic force microscope probe for local conductivity measurement is presented. The minimum space of the four-point atomic force microscope (AFM) probe is 300 nm. The AFM system with the newly developed four-point probe not only inherits the function of AFM surface topography generating but also has the capability of characterizing the local conductivity simultaneously. The local conductivities of aluminum and indium tin oxide thin films of 6.0μm and 350 nm thick are quantitatively measured respectively. The conductivity measurements indicate this four-point AFM probe technique has the capability of measuring submicrometer electrical conductivity.

Original languageEnglish
Pages (from-to)187-191
Number of pages5
JournalJixie Gongcheng Xuebao/Journal of Mechanical Engineering
Volume45
Issue number4
DOIs
Publication statusPublished - 2009 Apr 1

Keywords

  • Atomic force microscope
  • Conductive thin film
  • Four-point probe method
  • Local electrical conductivity

ASJC Scopus subject areas

  • Mechanical Engineering
  • Computer Science Applications
  • Applied Mathematics

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