Proposal of local deep level transient spectroscopy using super-higher-order scanning nonlinear dielectric microscopy and 2-dimensional imaging of trap distribution in SiO2/SiC interface

Norimichi Chinone, Ryoji Kosugi, Yasunori Tanaka, Shinsuke Harada, Hajime Okumura, Yasuo Cho

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

A new technique for microscopically evaluating insulator-semiconductor interface traps is proposed. The proposed technique is applied for SiO2/SiC stack structure and 2-dimensional imaging of interface traps is performed.

Original languageEnglish
Title of host publicationProceedings of the 2016 IEEE 23rd International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA 2016
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages360-364
Number of pages5
ISBN (Electronic)9781467382588
DOIs
Publication statusPublished - 2016 Sep 9
Event23rd IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA 2016 - Singapore, Singapore
Duration: 2016 Jul 182016 Jul 21

Publication series

NameProceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA
Volume2016-September

Other

Other23rd IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA 2016
CountrySingapore
CitySingapore
Period16/7/1816/7/21

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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    Chinone, N., Kosugi, R., Tanaka, Y., Harada, S., Okumura, H., & Cho, Y. (2016). Proposal of local deep level transient spectroscopy using super-higher-order scanning nonlinear dielectric microscopy and 2-dimensional imaging of trap distribution in SiO2/SiC interface. In Proceedings of the 2016 IEEE 23rd International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA 2016 (pp. 360-364). [7564317] (Proceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA; Vol. 2016-September). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/IPFA.2016.7564317