Property evaluation of vapor deposited TiN film by the analysis of elastic waves (1st Report, Nondestructive evaluation of elastic properties by laser surface acoustic waves)

Hideo Cho, Singo Ogawa, Kazushi Yamanaka, Mikio Takemoto

Research output: Contribution to journalArticlepeer-review

Abstract

Elastic properties of TiN films deposited on stainless steel SUS317J2 by three physical vapor deposition methods were estimated from the velocity dispersion of laser surface acoustic waves in the frequency range of 30 to 60 MHz. The velocity dispersion of Rayleigh waves was obtained by the Scanning Interference Fringes (SIF) and used to estimate the elastic stiffness of the films. Young's moduli of TiN films were found to increase in the order of activation reaction (ARE) method→hollow cathode discharge (HCD)→arc ion discharge (AID) method. The attenuation of Rayleigh waves was the highest for AID film due to the poor quality of the film.

Original languageEnglish
Pages (from-to)1050-1056
Number of pages7
JournalNippon Kikai Gakkai Ronbunshu, A Hen/Transactions of the Japan Society of Mechanical Engineers, Part A
Volume63
Issue number609
DOIs
Publication statusPublished - 1997

ASJC Scopus subject areas

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

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