Elastic properties of TiN films deposited on stainless steel SUS317J2 by three physical vapor deposition methods were estimated from the velocity dispersion of laser surface acoustic waves in the frequency range of 30 to 60 MHz. The velocity dispersion of Rayleigh waves was obtained by the Scanning Interference Fringes (SIF) and used to estimate the elastic stiffness of the films. Young's moduli of TiN films were found to increase in the order of activation reaction (ARE) method→hollow cathode discharge (HCD)→arc ion discharge (AID) method. The attenuation of Rayleigh waves was the highest for AID film due to the poor quality of the film.
|Number of pages||7|
|Journal||Nippon Kikai Gakkai Ronbunshu, A Hen/Transactions of the Japan Society of Mechanical Engineers, Part A|
|Publication status||Published - 1997|
ASJC Scopus subject areas
- Materials Science(all)
- Mechanics of Materials
- Mechanical Engineering