Property evaluation of vapor-deposited TiN film by the analysis of elastic waves: (2nd report, film strength estimated by AE source inversion during compressive loading)

Singo Ogawa, Hideo Cho, Kazushi Yamanaka, Mikio Takemoto

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)

Abstract

Damage progression of vapor-deposited TiN films on SUS317J2 steel under compressive loading was estimated by continuous monitoring of acoustic emission (AE). AE source inversion revealed that the film fracture progresses as follows: (1) Mode-II delamination at the edge of the TiN film during elastic strain, (2) Mode-I delamination of TiN due to the emergence of a slip step in the plastic region, and (3) Mode-I film fracture which allows the penetration of corrodent. The threshold strain that causes film damage was correlated with the mismatch of the elastic modulus of the TiN film to that of the substrate metal.

Original languageEnglish
Pages (from-to)446-451
Number of pages6
JournalJSME International Journal, Series A: Mechanics and Material Engineering
Volume41
Issue number3
DOIs
Publication statusPublished - 1998

Keywords

  • Acoustic Emission
  • Ceramics Film
  • Fracture Dynamics
  • Fracture Mode
  • Radiation Pattern
  • Source Location
  • Source Wave Analysis
  • Threshold Strain

ASJC Scopus subject areas

  • Engineering(all)

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