Property evaluation of vapor deposited TiN film by the analysis of elastic waves (2nd Report, Film strength estimated by AE source inversion during compressive loading)

Singo Ogawa; Hideo Cho; Kazushi Yamanaka; Mikio Takemoto

doi:10.1299/kikaia.63.1057

Property evaluation of vapor deposited TiN film by the analysis of elastic waves (2nd Report, Film strength estimated by AE source inversion during compressive loading)

Singo Ogawa, Hideo Cho, Kazushi Yamanaka, Mikio Takemoto

New Industry Creation Hatchery Center (NICHe)

Research output: Contribution to journal › Article › peer-review

2 Citations (Scopus)

Abstract

Damage progression of vapor deposited TiN films on SUS317J2 steel under compressive loading was estimated by continuous monitoring of acoustic emission (AE). AE source inversion revealed that the film fracture progresses during sequence of (1) Mode-II exfoliation at the edge of TiN film in the elastic strain, (2) Mode-I exfoliation of TiN by an emergence of slip step in the plastic region, and (3) Mode-I film fracture which allows the penetration of corrodent. The threshold strain that causes film damage was correlated with the mismatch of elastic modulus of TiN film to that of the steel substrate.

Original language	English
Pages (from-to)	1057-1062
Number of pages	6
Journal	Nippon Kikai Gakkai Ronbunshu, A Hen/Transactions of the Japan Society of Mechanical Engineers, Part A
Volume	63
Issue number	609
DOIs	https://doi.org/10.1299/kikaia.63.1057
Publication status	Published - 1997

ASJC Scopus subject areas

Materials Science(all)
Mechanics of Materials
Mechanical Engineering

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Ogawa, S., Cho, H., Yamanaka, K., & Takemoto, M. (1997). Property evaluation of vapor deposited TiN film by the analysis of elastic waves (2nd Report, Film strength estimated by AE source inversion during compressive loading). Nippon Kikai Gakkai Ronbunshu, A Hen/Transactions of the Japan Society of Mechanical Engineers, Part A, 63(609), 1057-1062. https://doi.org/10.1299/kikaia.63.1057

Property evaluation of vapor deposited TiN film by the analysis of elastic waves (2nd Report, Film strength estimated by AE source inversion during compressive loading). / Ogawa, Singo; Cho, Hideo; Yamanaka, Kazushi; Takemoto, Mikio.

In: Nippon Kikai Gakkai Ronbunshu, A Hen/Transactions of the Japan Society of Mechanical Engineers, Part A, Vol. 63, No. 609, 1997, p. 1057-1062.

Research output: Contribution to journal › Article › peer-review

Ogawa, S, Cho, H, Yamanaka, K & Takemoto, M 1997, 'Property evaluation of vapor deposited TiN film by the analysis of elastic waves (2nd Report, Film strength estimated by AE source inversion during compressive loading)', Nippon Kikai Gakkai Ronbunshu, A Hen/Transactions of the Japan Society of Mechanical Engineers, Part A, vol. 63, no. 609, pp. 1057-1062. https://doi.org/10.1299/kikaia.63.1057

Ogawa S, Cho H, Yamanaka K, Takemoto M. Property evaluation of vapor deposited TiN film by the analysis of elastic waves (2nd Report, Film strength estimated by AE source inversion during compressive loading). Nippon Kikai Gakkai Ronbunshu, A Hen/Transactions of the Japan Society of Mechanical Engineers, Part A. 1997;63(609):1057-1062. https://doi.org/10.1299/kikaia.63.1057

Ogawa, Singo ; Cho, Hideo ; Yamanaka, Kazushi ; Takemoto, Mikio. / Property evaluation of vapor deposited TiN film by the analysis of elastic waves (2nd Report, Film strength estimated by AE source inversion during compressive loading). In: Nippon Kikai Gakkai Ronbunshu, A Hen/Transactions of the Japan Society of Mechanical Engineers, Part A. 1997 ; Vol. 63, No. 609. pp. 1057-1062.

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