Property evaluation of vapor deposited TiN film by the analysis of elastic waves (2nd Report, Film strength estimated by AE source inversion during compressive loading)

Singo Ogawa, Hideo Cho, Kazushi Yamanaka, Mikio Takemoto

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)

Abstract

Damage progression of vapor deposited TiN films on SUS317J2 steel under compressive loading was estimated by continuous monitoring of acoustic emission (AE). AE source inversion revealed that the film fracture progresses during sequence of (1) Mode-II exfoliation at the edge of TiN film in the elastic strain, (2) Mode-I exfoliation of TiN by an emergence of slip step in the plastic region, and (3) Mode-I film fracture which allows the penetration of corrodent. The threshold strain that causes film damage was correlated with the mismatch of elastic modulus of TiN film to that of the steel substrate.

Original languageEnglish
Pages (from-to)1057-1062
Number of pages6
JournalNippon Kikai Gakkai Ronbunshu, A Hen/Transactions of the Japan Society of Mechanical Engineers, Part A
Volume63
Issue number609
DOIs
Publication statusPublished - 1997

ASJC Scopus subject areas

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

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