TY - JOUR
T1 - Property evaluation of vapor deposited TiN film by the analysis of elastic waves (2nd Report, Film strength estimated by AE source inversion during compressive loading)
AU - Ogawa, Singo
AU - Cho, Hideo
AU - Yamanaka, Kazushi
AU - Takemoto, Mikio
PY - 1997
Y1 - 1997
N2 - Damage progression of vapor deposited TiN films on SUS317J2 steel under compressive loading was estimated by continuous monitoring of acoustic emission (AE). AE source inversion revealed that the film fracture progresses during sequence of (1) Mode-II exfoliation at the edge of TiN film in the elastic strain, (2) Mode-I exfoliation of TiN by an emergence of slip step in the plastic region, and (3) Mode-I film fracture which allows the penetration of corrodent. The threshold strain that causes film damage was correlated with the mismatch of elastic modulus of TiN film to that of the steel substrate.
AB - Damage progression of vapor deposited TiN films on SUS317J2 steel under compressive loading was estimated by continuous monitoring of acoustic emission (AE). AE source inversion revealed that the film fracture progresses during sequence of (1) Mode-II exfoliation at the edge of TiN film in the elastic strain, (2) Mode-I exfoliation of TiN by an emergence of slip step in the plastic region, and (3) Mode-I film fracture which allows the penetration of corrodent. The threshold strain that causes film damage was correlated with the mismatch of elastic modulus of TiN film to that of the steel substrate.
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U2 - 10.1299/kikaia.63.1057
DO - 10.1299/kikaia.63.1057
M3 - Article
AN - SCOPUS:0031145005
VL - 63
SP - 1057
EP - 1062
JO - Nihon Kikai Gakkai Ronbunshu, A Hen/Transactions of the Japan Society of Mechanical Engineers, Part A
JF - Nihon Kikai Gakkai Ronbunshu, A Hen/Transactions of the Japan Society of Mechanical Engineers, Part A
SN - 0387-5008
IS - 609
ER -