Properties of Poly-Si Thin films and Their Transistors Fabricated Using Selective Excimer Laser Annealing

Tetsuya Goto, Kaori Saito, Fuminobu Imaizumi, Makoto Hatanaka, Masami Takimoto, Michinobu Mizumura, Jun Gotoh, Hirosi Ikenouc, Kazuo Udagawa, Junji Kido, Shigetoshi Sugawa

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Selective laser annealing system was developed, and applied to fabricate low temperature poly-Si thin film transistors. The new system performs the laser annealing only for the selective area of TFT region by adopting micro lens array, which can apply the laser annealing even for large substrate, contrary to the conventional excimer laser annealing system having the limitation in substrate size due to the difficulty in obtaining uniform beam line. In this study, selectively-annealed poly-Si film structure and their TFT performance were investigated. Grain size increased as an increase in the laser energy density, and TFTs with the field effect mobility larger than 100 cm2V-1s-1 with the on-off ratio of drain current of 106 or more could be obtained.

Original languageEnglish
Title of host publicationAM-FPD 2018 - 25th International Workshop on Active-Matrix Flatpanel Displays and Devices
Subtitle of host publicationTFT Technologies and FPD Materials, Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Print)9784990875350
DOIs
Publication statusPublished - 2018 Aug 15
Event25th International Workshop on Active-Matrix Flatpanel Displays and Devices - TFT Technologies and FPD Materials, AM-FPD 2018 - Kyoto, Japan
Duration: 2018 Jul 32018 Jul 6

Publication series

NameAM-FPD 2018 - 25th International Workshop on Active-Matrix Flatpanel Displays and Devices: TFT Technologies and FPD Materials, Proceedings

Other

Other25th International Workshop on Active-Matrix Flatpanel Displays and Devices - TFT Technologies and FPD Materials, AM-FPD 2018
CountryJapan
CityKyoto
Period18/7/318/7/6

ASJC Scopus subject areas

  • Media Technology
  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics

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