Properties of high resistivity CoPdAlO film for possibility of application to RF integrated inductor

Taek Soo Kim, Kenkichi Suezawa, Masahiro Yamaguchi, Ken Ichi Arai, Yutaka Shimada, Chong Oh Kim

Research output: Contribution to journalConference articlepeer-review

16 Citations (Scopus)

Abstract

Presently, an inductor adapted at MMIC (Monolithic Microwave integrated Circuit) which is used for cellular phone or PHS operates at quasimicrowave range over 800 MHz. However, a W-CDMA (Wideband Code Division Multiple Access) will use about 2 GHz range. Therefore magnetic film devices should be compatible up to 2 GHz. We deposited Co-Pd-Al-O system film using rf sputtering method which is expected for operating at 2 GHz, and investigated the effect of Pd content and magnetic field annealing. When Pd composition is 19%, H k was 118 Oe, and showed flat frequency characteristics until 1.5 GHz. The Q factor (=μ′/μ″) was 23.3 at 1 GHz, 6.7 at 1.5 GHz and 1.5 at 2 GHz, respectively. Resonance frequency was 2.9 GHz. Therefore Co-Pd-Al-O thin film could be used at over 1 GHz, and also expected as an inductor material for next generation MMIC.

Original languageEnglish
Pages (from-to)2255-2257
Number of pages3
JournalIEEE Transactions on Magnetics
Volume37
Issue number4 I
DOIs
Publication statusPublished - 2001 Jul
Event8th Joint Magnetism and Magnetic Materials -International Magnetic Conference- (MMM-Intermag) - San Antonio, TX, United States
Duration: 2001 Jan 72001 Jan 11

Keywords

  • Complex permeability
  • Ferromagnetic resonance
  • Granular film
  • MMIC

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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