Properties and structure of carbon excess TixC1-x deposited onto molybdenum by magnetron sputtering

T. Shikama, H. Araki, M. Fujitsuka, M. Fukutomi, H. Shinno, M. Okada

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30 Citations (Scopus)


There has been little concern about the properties and structure of the carbon excess TixC1-x(x<0.5) deposits, although many investigations have been conducted on the single-phase TixC1-x(x>0.5) deposits. It is found that carbon excess TixC1-x deposits prepared by magnetron sputter coating have a higher microhardness than the stoichiometric deposits and show a strongly (111)-preferred orientation. The results of C Kα X-ray spectroscopy of these films strongly suggest that carbon excess TixC1-x exists as a single phase of titanium carbide without the formation of a secondary graphite phase. The abnormal diffusion of substrate molybdenum atoms into the carbon excess TixC1-x deposits suggests that they contain a high population of the titanium vacancies.

Original languageEnglish
Pages (from-to)185-194
Number of pages10
JournalThin Solid Films
Issue number3
Publication statusPublished - 1983 Aug 19

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry


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