Properties and structure of carbon excess TixC1-x deposited onto molybdenum by magnetron sputtering

T. Shikama, H. Araki, M. Fujitsuka, M. Fukutomi, H. Shinno, M. Okada

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Abstract

There has been little concern about the properties and structure of the carbon excess TixC1-x(x<0.5) deposits, although many investigations have been conducted on the single-phase TixC1-x(x>0.5) deposits. It is found that carbon excess TixC1-x deposits prepared by magnetron sputter coating have a higher microhardness than the stoichiometric deposits and show a strongly (111)-preferred orientation. The results of C Kα X-ray spectroscopy of these films strongly suggest that carbon excess TixC1-x exists as a single phase of titanium carbide without the formation of a secondary graphite phase. The abnormal diffusion of substrate molybdenum atoms into the carbon excess TixC1-x deposits suggests that they contain a high population of the titanium vacancies.

Original languageEnglish
Pages (from-to)185-194
Number of pages10
JournalThin Solid Films
Volume106
Issue number3
DOIs
Publication statusPublished - 1983 Aug 19

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

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    Shikama, T., Araki, H., Fujitsuka, M., Fukutomi, M., Shinno, H., & Okada, M. (1983). Properties and structure of carbon excess TixC1-x deposited onto molybdenum by magnetron sputtering. Thin Solid Films, 106(3), 185-194. https://doi.org/10.1016/0040-6090(83)90480-7