TY - JOUR
T1 - Propagation properties of leaky surface acoustic wave on water-loaded piezoelectric substrate
AU - Suenaga, Ryota
AU - Suzuki, Masashi
AU - Kakio, Shoji
AU - Ohashi, Yuji
AU - Arakawa, Mototaka
AU - Kushibiki, Jun Ichi
N1 - Publisher Copyright:
© 2018 The Japan Society of Applied Physics
PY - 2018/7
Y1 - 2018/7
N2 - To evaluate acoustical loss mainly due to Rayleigh scattering loss of a thin film material using a line-focus-beam ultrasonic material characterization system, surface acoustic waves (SAWs) were excited and detected using IDTs, the propagation properties of SAWs with and without water loading were measured, and the acoustical losses of amorphous SiO2 and Ta2O5 thin films deposited on 128°YX-LiNbO3 were evaluated by subtracting the calculated attenuation of leakage loss into water from the measured propagation loss of leaky SAWs (LSAWs) on water-loaded specimens. The results of the evaluation of acoustical losses using LSAWs with the SAW propagation mode of the small leakage loss were in good agreement with the measured propagation loss of the Rayleigh-type SAW corresponding to the acoustical loss.
AB - To evaluate acoustical loss mainly due to Rayleigh scattering loss of a thin film material using a line-focus-beam ultrasonic material characterization system, surface acoustic waves (SAWs) were excited and detected using IDTs, the propagation properties of SAWs with and without water loading were measured, and the acoustical losses of amorphous SiO2 and Ta2O5 thin films deposited on 128°YX-LiNbO3 were evaluated by subtracting the calculated attenuation of leakage loss into water from the measured propagation loss of leaky SAWs (LSAWs) on water-loaded specimens. The results of the evaluation of acoustical losses using LSAWs with the SAW propagation mode of the small leakage loss were in good agreement with the measured propagation loss of the Rayleigh-type SAW corresponding to the acoustical loss.
UR - http://www.scopus.com/inward/record.url?scp=85049404344&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85049404344&partnerID=8YFLogxK
U2 - 10.7567/JJAP.57.07LC10
DO - 10.7567/JJAP.57.07LC10
M3 - Article
AN - SCOPUS:85049404344
VL - 57
JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
SN - 0021-4922
IS - 7
M1 - 07LC10
ER -