Progress in performance enhancement methods for capacitive silicon resonators

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8 Citations (Scopus)


In this paper, we review the progress in recent studies on the performance enhancement methods for capacitive silicon resonators. We provide information on various fabrication technologies and design considerations that can be employed to improve the performance of capacitive silicon resonators, including low motional resistance, small insertion loss, and high quality factor (Q). This paper contains an overview of device structures and working principles, fabrication technologies consisting of hermetic packaging, deep reactive-ion etching and neutral beam etching, and design considerations including mechanically coupled, movable electrode structures and piezoresistive heat engines.

Original languageEnglish
Article number110101
JournalJapanese journal of applied physics
Issue number11
Publication statusPublished - 2017 Nov

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)


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