Profile measurement of micro-structured surfaces by using SPMs

Shigeaki Goto, Takemi Asai, Yoshikazu Arai, I Ko

Research output: Contribution to conferencePaper

Abstract

In this paper, to realize rapid measurement for micro-structured surfaces, forces and currents are adopted as feedback signals for scanning probe microscopes (SPMs). These two kinds of signals are examined with a piezoelectric actuator. The nonlinearities of the actuator are compensated for with a resolution of 1 nm by a linear encoder. By using this measurement system, experiments of tracking the Z-directional displacement of a PZT stage are done with both the scanning force microscopy (SFM) and the scanning current microscopy (SCM). The constructed SCM shows better results than the SFM in terms of stability and sensitivity.

Original languageEnglish
Publication statusPublished - 2009 Dec 1
Event5th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2009 - Osaka, Japan
Duration: 2009 Dec 22009 Dec 4

Other

Other5th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2009
CountryJapan
CityOsaka
Period09/12/209/12/4

Keywords

  • Measurement
  • Micro-structured surface
  • Nanometrology
  • Scanning current microscope
  • Scanning force microscope
  • Scanning probe microscope

ASJC Scopus subject areas

  • Industrial and Manufacturing Engineering

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  • Cite this

    Goto, S., Asai, T., Arai, Y., & Ko, I. (2009). Profile measurement of micro-structured surfaces by using SPMs. Paper presented at 5th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2009, Osaka, Japan.