Profile measurement of micro-structured surfaces by using SPMs

Shigeaki Goto; Takemi Asai; Yoshikazu Arai; I Ko

Profile measurement of micro-structured surfaces by using SPMs

Shigeaki Goto, Takemi Asai, Yoshikazu Arai, I Ko

ENG - Finemechanics

Research output: Contribution to conference › Paper › peer-review

Abstract

In this paper, to realize rapid measurement for micro-structured surfaces, forces and currents are adopted as feedback signals for scanning probe microscopes (SPMs). These two kinds of signals are examined with a piezoelectric actuator. The nonlinearities of the actuator are compensated for with a resolution of 1 nm by a linear encoder. By using this measurement system, experiments of tracking the Z-directional displacement of a PZT stage are done with both the scanning force microscopy (SFM) and the scanning current microscopy (SCM). The constructed SCM shows better results than the SFM in terms of stability and sensitivity.

Original language	English
Publication status	Published - 2009 Dec 1
Event	5th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2009 - Osaka, Japan Duration: 2009 Dec 2 → 2009 Dec 4

Other

Other	5th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2009
Country	Japan
City	Osaka
Period	09/12/2 → 09/12/4

Keywords

Measurement
Micro-structured surface
Nanometrology
Scanning current microscope
Scanning force microscope
Scanning probe microscope

ASJC Scopus subject areas

Industrial and Manufacturing Engineering

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Cite this

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title = "Profile measurement of micro-structured surfaces by using SPMs",

abstract = "In this paper, to realize rapid measurement for micro-structured surfaces, forces and currents are adopted as feedback signals for scanning probe microscopes (SPMs). These two kinds of signals are examined with a piezoelectric actuator. The nonlinearities of the actuator are compensated for with a resolution of 1 nm by a linear encoder. By using this measurement system, experiments of tracking the Z-directional displacement of a PZT stage are done with both the scanning force microscopy (SFM) and the scanning current microscopy (SCM). The constructed SCM shows better results than the SFM in terms of stability and sensitivity.",

keywords = "Measurement, Micro-structured surface, Nanometrology, Scanning current microscope, Scanning force microscope, Scanning probe microscope",

author = "Shigeaki Goto and Takemi Asai and Yoshikazu Arai and I Ko",

year = "2009",

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note = "5th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2009 ; Conference date: 02-12-2009 Through 04-12-2009",

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TY - CONF

T1 - Profile measurement of micro-structured surfaces by using SPMs

AU - Goto, Shigeaki

AU - Asai, Takemi

AU - Arai, Yoshikazu

AU - Ko, I

PY - 2009/12/1

Y1 - 2009/12/1

N2 - In this paper, to realize rapid measurement for micro-structured surfaces, forces and currents are adopted as feedback signals for scanning probe microscopes (SPMs). These two kinds of signals are examined with a piezoelectric actuator. The nonlinearities of the actuator are compensated for with a resolution of 1 nm by a linear encoder. By using this measurement system, experiments of tracking the Z-directional displacement of a PZT stage are done with both the scanning force microscopy (SFM) and the scanning current microscopy (SCM). The constructed SCM shows better results than the SFM in terms of stability and sensitivity.

AB - In this paper, to realize rapid measurement for micro-structured surfaces, forces and currents are adopted as feedback signals for scanning probe microscopes (SPMs). These two kinds of signals are examined with a piezoelectric actuator. The nonlinearities of the actuator are compensated for with a resolution of 1 nm by a linear encoder. By using this measurement system, experiments of tracking the Z-directional displacement of a PZT stage are done with both the scanning force microscopy (SFM) and the scanning current microscopy (SCM). The constructed SCM shows better results than the SFM in terms of stability and sensitivity.

KW - Measurement

KW - Micro-structured surface

KW - Nanometrology

KW - Scanning current microscope

KW - Scanning force microscope

KW - Scanning probe microscope

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M3 - Paper

AN - SCOPUS:84883391098

T2 - 5th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2009

Y2 - 2 December 2009 through 4 December 2009

ER -