Profile measurement by using a femtosecond laser chromatic confocal probe

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Confocal probes are widely employed in many industrial fields due to the depth-sectioning effect. The author’s group has also proposed a chromatic confocal probe employing a mode-locked femtosecond laser source which can realize an axial resolution of 30 nm and a measurement range of 40 µm. Efforts have also been made to improve the thermal stability of the developed femtosecond laser chromatic confocal probe so that the probe can be applied for long-term displacement measurement or surface profile measurement. Meanwhile, surface profile measurement has not been carried out by using the developed femtosecond laser chromatic confocal probe. For the verification of the performance of developed probe in profile measurement, in this paper, an experimental setup is built and a basic experiment is carried out. By using the probe with further improved thermal stability, the measurement of a sample surface profile is carried out. In this paper, the development of the experimental setup with the femtosecond laser chromatic confocal probe, as well as the results of the surface profile measurements, is presented.

Original languageEnglish
Title of host publicationJSME 2020 Conference on Leading Edge Manufacturing/Materials and Processing, LEMP 2020
PublisherAmerican Society of Mechanical Engineers
ISBN (Electronic)9780791883624
DOIs
Publication statusPublished - 2020
EventJSME 2020 Conference on Leading Edge Manufacturing/Materials and Processing, LEMP 2020 - Virtual, Online
Duration: 2020 Sep 3 → …

Publication series

NameJSME 2020 Conference on Leading Edge Manufacturing/Materials and Processing, LEMP 2020

Conference

ConferenceJSME 2020 Conference on Leading Edge Manufacturing/Materials and Processing, LEMP 2020
CityVirtual, Online
Period20/9/3 → …

Keywords

  • Chromatic confocal probe
  • Measurement resolution
  • Mode-locked femtosecond laser
  • Thermal stability

ASJC Scopus subject areas

  • Industrial and Manufacturing Engineering
  • Mechanical Engineering
  • Mechanics of Materials
  • Materials Science (miscellaneous)
  • Instrumentation

Fingerprint Dive into the research topics of 'Profile measurement by using a femtosecond laser chromatic confocal probe'. Together they form a unique fingerprint.

Cite this