Production of uniform large-diameter radio-frequency discharge plasma

Yunlong Li, Satoru Iizuka, Noriyoshi Sato

Research output: Contribution to journalArticlepeer-review

27 Citations (Scopus)

Abstract

A new radio-frequency (rf) discharge plasma source at frequency of 13.56 MHz is presented. The rf plasma is produced by a modified magnetron-typed rf discharge using a cylindrical electrode with permanent magnet rings. The electron density of 2.5×1010 cm-3 with an electron temperature of 3.7 eV, uniform within a few percent over 50 cm in diameter, is obtained on both sides at 5-6 cm from the axial center of the rf electrode when the rf power is 600 W under argon pressure of 3.6×10-4 Torr.

Original languageEnglish
Pages (from-to)28-30
Number of pages3
JournalApplied Physics Letters
Volume65
Issue number1
DOIs
Publication statusPublished - 1994 Dec 1

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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