Production of high density and low electron-temperature plasma by a modified grid-biasing method using inductively coupled RF discharge

Reijiro Ikada, Gouki Nishimura, Kohgi Kato, Satoru Iizuka

Research output: Contribution to journalConference articlepeer-review

12 Citations (Scopus)

Fingerprint Dive into the research topics of 'Production of high density and low electron-temperature plasma by a modified grid-biasing method using inductively coupled RF discharge'. Together they form a unique fingerprint.

Chemical Compounds

Engineering & Materials Science

Physics & Astronomy