TY - JOUR
T1 - Production of carbon nanotubes by controlling radio-frequency glow discharge with reactive gases
AU - Satake, N.
AU - Jeong, G. H.
AU - Hirata, T.
AU - Hatakeyama, R.
AU - Ishida, H.
AU - Tohji, K.
AU - Motomiya, K.
N1 - Funding Information:
Part of this work was carried out under the Cooperative Research Project Program of the Research Institute of Electrical Communication, Tohoku University. This work was also supported by a Grant-In-Aid for Scientific Research from the Ministry of Education, Culture, Sports, Science, and Technology, Japan.
PY - 2002/10
Y1 - 2002/10
N2 - Relations between plasma characteristics and formation processes of carbon nanotubes (CNTs) are investigated in order to develop an effective method for producing CNTs using glow discharge reactive plasmas. The plasma generated by the radio-frequency (RF) discharge in a crossed magnetic field is found to be apparently localized around an RF electrode under a certain condition determined by the magnetic-field strength and mixed gas (CH4 + H2) pressure. In this case, it is demonstrated that CNTs are most effectively produced on the RF electrode which is negatively self-biased and exposed to a strong plasma-sheath drop.
AB - Relations between plasma characteristics and formation processes of carbon nanotubes (CNTs) are investigated in order to develop an effective method for producing CNTs using glow discharge reactive plasmas. The plasma generated by the radio-frequency (RF) discharge in a crossed magnetic field is found to be apparently localized around an RF electrode under a certain condition determined by the magnetic-field strength and mixed gas (CH4 + H2) pressure. In this case, it is demonstrated that CNTs are most effectively produced on the RF electrode which is negatively self-biased and exposed to a strong plasma-sheath drop.
KW - Carbon nanotube prodution
KW - RF glow discharge
KW - Reactive-plasma characteristics
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U2 - 10.1016/S0921-4526(02)01025-6
DO - 10.1016/S0921-4526(02)01025-6
M3 - Conference article
AN - SCOPUS:0036776492
VL - 323
SP - 290
EP - 292
JO - Physica B: Condensed Matter
JF - Physica B: Condensed Matter
SN - 0921-4526
IS - 1-4
T2 - Proceedings of the Tsukuba Symposium on Carbon Nanotube in Com (CNT10)
Y2 - 3 October 2001 through 5 October 2001
ER -