Production of carbon nanotubes by controlling radio-frequency glow discharge with reactive gases

N. Satake, G. H. Jeong, T. Hirata, R. Hatakeyama, H. Ishida, K. Tohji, K. Motomiya

Research output: Contribution to journalConference articlepeer-review

19 Citations (Scopus)

Abstract

Relations between plasma characteristics and formation processes of carbon nanotubes (CNTs) are investigated in order to develop an effective method for producing CNTs using glow discharge reactive plasmas. The plasma generated by the radio-frequency (RF) discharge in a crossed magnetic field is found to be apparently localized around an RF electrode under a certain condition determined by the magnetic-field strength and mixed gas (CH4 + H2) pressure. In this case, it is demonstrated that CNTs are most effectively produced on the RF electrode which is negatively self-biased and exposed to a strong plasma-sheath drop.

Original languageEnglish
Pages (from-to)290-292
Number of pages3
JournalPhysica B: Condensed Matter
Volume323
Issue number1-4
DOIs
Publication statusPublished - 2002 Oct
EventProceedings of the Tsukuba Symposium on Carbon Nanotube in Com (CNT10) - Tsukuba, Japan
Duration: 2001 Oct 32001 Oct 5

Keywords

  • Carbon nanotube prodution
  • RF glow discharge
  • Reactive-plasma characteristics

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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