Processing and characteristics of piezoelectric microcantilevers without substrate

Ziping Cao; Jinya Zhang; Hiroki Kuwano

doi:10.1109/NEMS.2010.5592254

Processing and characteristics of piezoelectric microcantilevers without substrate

Ziping Cao, Jinya Zhang, Hiroki Kuwano

New Industry Creation Hatchery Center (NICHe)

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

Based on a 4 um thick PZT films with (100) orientation, piezoelectric microcantilevers without a substrate support (free-stand) were fabricated with a typical micromachining process. These microcantilevers have low natural frequency which is suitable for the application on vibration energy harvesting. Simultaneously, their large linear displacement induced by voltage indicates they are also good microactuators, and the calculated piezoelectric coefficient d₃₁ is one of third of that of bulky PZT ceramics.

Original language	English
Title of host publication	2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010
Pages	716-719
Number of pages	4
DOIs	https://doi.org/10.1109/NEMS.2010.5592254
Publication status	Published - 2010 Nov 29
Event	5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010 - Xiamen, China Duration: 2010 Jan 20 → 2010 Jan 23

Publication series

Name	2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010

Other

Other	5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010
Country	China
City	Xiamen
Period	10/1/20 → 10/1/23

Keywords

Lead zirconate titanate (PZT)
Microcantilevers
Micromaching
Thick films

ASJC Scopus subject areas

Control and Systems Engineering
Electrical and Electronic Engineering

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10.1109/NEMS.2010.5592254

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Cao, Z., Zhang, J., & Kuwano, H. (2010). Processing and characteristics of piezoelectric microcantilevers without substrate. In 2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010 (pp. 716-719). [5592254] (2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010). https://doi.org/10.1109/NEMS.2010.5592254

Processing and characteristics of piezoelectric microcantilevers without substrate. / Cao, Ziping; Zhang, Jinya; Kuwano, Hiroki.

2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010. 2010. p. 716-719 5592254 (2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Cao, Z, Zhang, J & Kuwano, H 2010, Processing and characteristics of piezoelectric microcantilevers without substrate. in 2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010., 5592254, 2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010, pp. 716-719, 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010, Xiamen, China, 10/1/20. https://doi.org/10.1109/NEMS.2010.5592254

Cao Z, Zhang J, Kuwano H. Processing and characteristics of piezoelectric microcantilevers without substrate. In 2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010. 2010. p. 716-719. 5592254. (2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010). https://doi.org/10.1109/NEMS.2010.5592254

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