TY - GEN
T1 - Processing and characteristics of piezoelectric microcantilevers without substrate
AU - Cao, Ziping
AU - Zhang, Jinya
AU - Kuwano, Hiroki
PY - 2010/11/29
Y1 - 2010/11/29
N2 - Based on a 4 um thick PZT films with (100) orientation, piezoelectric microcantilevers without a substrate support (free-stand) were fabricated with a typical micromachining process. These microcantilevers have low natural frequency which is suitable for the application on vibration energy harvesting. Simultaneously, their large linear displacement induced by voltage indicates they are also good microactuators, and the calculated piezoelectric coefficient d31 is one of third of that of bulky PZT ceramics.
AB - Based on a 4 um thick PZT films with (100) orientation, piezoelectric microcantilevers without a substrate support (free-stand) were fabricated with a typical micromachining process. These microcantilevers have low natural frequency which is suitable for the application on vibration energy harvesting. Simultaneously, their large linear displacement induced by voltage indicates they are also good microactuators, and the calculated piezoelectric coefficient d31 is one of third of that of bulky PZT ceramics.
KW - Lead zirconate titanate (PZT)
KW - Microcantilevers
KW - Micromaching
KW - Thick films
UR - http://www.scopus.com/inward/record.url?scp=78649252337&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=78649252337&partnerID=8YFLogxK
U2 - 10.1109/NEMS.2010.5592254
DO - 10.1109/NEMS.2010.5592254
M3 - Conference contribution
AN - SCOPUS:78649252337
SN - 9781424465439
T3 - 2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010
SP - 716
EP - 719
BT - 2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010
T2 - 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010
Y2 - 20 January 2010 through 23 January 2010
ER -