Processing and characteristics of piezoelectric microcantilevers without substrate

Ziping Cao, Jinya Zhang, Hiroki Kuwano

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Based on a 4 um thick PZT films with (100) orientation, piezoelectric microcantilevers without a substrate support (free-stand) were fabricated with a typical micromachining process. These microcantilevers have low natural frequency which is suitable for the application on vibration energy harvesting. Simultaneously, their large linear displacement induced by voltage indicates they are also good microactuators, and the calculated piezoelectric coefficient d31 is one of third of that of bulky PZT ceramics.

Original languageEnglish
Title of host publication2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010
Pages716-719
Number of pages4
DOIs
Publication statusPublished - 2010 Nov 29
Event5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010 - Xiamen, China
Duration: 2010 Jan 202010 Jan 23

Publication series

Name2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010

Other

Other5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010
CountryChina
CityXiamen
Period10/1/2010/1/23

Keywords

  • Lead zirconate titanate (PZT)
  • Microcantilevers
  • Micromaching
  • Thick films

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

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  • Cite this

    Cao, Z., Zhang, J., & Kuwano, H. (2010). Processing and characteristics of piezoelectric microcantilevers without substrate. In 2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010 (pp. 716-719). [5592254] (2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010). https://doi.org/10.1109/NEMS.2010.5592254