Abstract
The authors show that the smoothness of the Si surface is significantly affected by electric characteristics of a device. A technology is introduced to cover the Si(111) surface with mono hydride.
Original language | English |
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Pages | 199-223 |
Number of pages | 25 |
Publication status | Published - 1992 Dec 1 |
Event | Conference on Semiconductor Pure Water and Chemicals - Santa Clara, CA, USA Duration: 1992 Feb 11 → 1992 Feb 13 |
Other
Other | Conference on Semiconductor Pure Water and Chemicals |
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City | Santa Clara, CA, USA |
Period | 92/2/11 → 92/2/13 |
ASJC Scopus subject areas
- Water Science and Technology
- Electronic, Optical and Magnetic Materials