Printing sub-100 nanometer features near-field photolithography

Shuji Tanaka, Masayuki Nakao, Yotaro Hatamura, Masanori Komuro, Hiroshi Hiroshima, Masahiro Hatakeyama

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)

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Physics & Astronomy

Engineering & Materials Science