This paper reports an on-chip micro battery which can be fabricated on a CMOS chip. The battery consists of screen-printed Mg and AgCl films. An open circuit voltage of 1.58 V, the maximum power of 1.4 mW and a total stored energy of 400 mJ were obtained from anode and cathode electrodes of about 3 × 3 mm2. Demonstration devices self-powered by the on-chip battery worked in a 0.14 M NaCl solution, and digital data transmission from the devices using optical and electrical field methods were confirmed.
|Journal||Journal of Physics: Conference Series|
|Publication status||Published - 2015 Dec 10|
|Event||15th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, PowerMEMS 2015 - Boston, United States|
Duration: 2015 Dec 1 → 2015 Dec 4
ASJC Scopus subject areas
- Physics and Astronomy(all)