Abstract
A quartz core microcantilever was fabricated from an optical fiber tip and was vibrated photothermally by laser diode light through the optical fiber. The vibration of the cantilever is stable and complicated adjustment of the optical system is not necessary. Pressure dependence of the resonance curve was measured for cantilevers of various sizes, and evaluated using a "string-of-beads" model for the quartz oscillator.
Original language | English |
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Pages (from-to) | 475-477 |
Number of pages | 3 |
Journal | Vacuum |
Volume | 47 |
Issue number | 6-8 |
DOIs | |
Publication status | Published - 1996 |
Keywords
- Optical fiber
- Photomechanical sensor
- Photothermal vibration
- Quartz core microstructure
- Vacuum gauge
ASJC Scopus subject areas
- Instrumentation
- Condensed Matter Physics
- Surfaces, Coatings and Films