Pressure dependence of resonance characteristics of the microcantilever fabricated from optical fiber

H. Kumazaki; S. Inabaa; K. Hane

doi:10.1016/0042-207x(96)00146-7

Pressure dependence of resonance characteristics of the microcantilever fabricated from optical fiber

H. Kumazaki, S. Inabaa, K. Hane

ENG - Finemechanics

Research output: Contribution to journal › Article › peer-review

18 Citations (Scopus)

Abstract

A quartz core microcantilever was fabricated from an optical fiber tip and was vibrated photothermally by laser diode light through the optical fiber. The vibration of the cantilever is stable and complicated adjustment of the optical system is not necessary. Pressure dependence of the resonance curve was measured for cantilevers of various sizes, and evaluated using a "string-of-beads" model for the quartz oscillator.

Original language	English
Pages (from-to)	475-477
Number of pages	3
Journal	Vacuum
Volume	47
Issue number	6-8
DOIs	https://doi.org/10.1016/0042-207x(96)00146-7
Publication status	Published - 1996

Keywords

Optical fiber
Photomechanical sensor
Photothermal vibration
Quartz core microstructure
Vacuum gauge

ASJC Scopus subject areas

Instrumentation
Condensed Matter Physics
Surfaces, Coatings and Films

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title = "Pressure dependence of resonance characteristics of the microcantilever fabricated from optical fiber",

abstract = "A quartz core microcantilever was fabricated from an optical fiber tip and was vibrated photothermally by laser diode light through the optical fiber. The vibration of the cantilever is stable and complicated adjustment of the optical system is not necessary. Pressure dependence of the resonance curve was measured for cantilevers of various sizes, and evaluated using a {"}string-of-beads{"} model for the quartz oscillator.",

keywords = "Optical fiber, Photomechanical sensor, Photothermal vibration, Quartz core microstructure, Vacuum gauge",

author = "H. Kumazaki and S. Inabaa and K. Hane",

note = "Funding Information: This work was supported in part by Grant\-in-Aid for General Scientific Research and Developmental Scientific Research frotn the Ministry of Education. Science and C{\textquoteright}ulture of Japan. This work was also supported in part by Yasuda Corporation. Copyright: Copyright 2020 Elsevier B.V., All rights reserved.",

year = "1996",

doi = "10.1016/0042-207x(96)00146-7",

language = "English",

volume = "47",

pages = "475--477",

journal = "Vacuum",

issn = "0042-207X",

publisher = "Elsevier Limited",

number = "6-8",

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TY - JOUR

T1 - Pressure dependence of resonance characteristics of the microcantilever fabricated from optical fiber

AU - Kumazaki, H.

AU - Inabaa, S.

AU - Hane, K.

N1 - Funding Information: This work was supported in part by Grant\-in-Aid for General Scientific Research and Developmental Scientific Research frotn the Ministry of Education. Science and C’ulture of Japan. This work was also supported in part by Yasuda Corporation. Copyright: Copyright 2020 Elsevier B.V., All rights reserved.

PY - 1996

Y1 - 1996

N2 - A quartz core microcantilever was fabricated from an optical fiber tip and was vibrated photothermally by laser diode light through the optical fiber. The vibration of the cantilever is stable and complicated adjustment of the optical system is not necessary. Pressure dependence of the resonance curve was measured for cantilevers of various sizes, and evaluated using a "string-of-beads" model for the quartz oscillator.

AB - A quartz core microcantilever was fabricated from an optical fiber tip and was vibrated photothermally by laser diode light through the optical fiber. The vibration of the cantilever is stable and complicated adjustment of the optical system is not necessary. Pressure dependence of the resonance curve was measured for cantilevers of various sizes, and evaluated using a "string-of-beads" model for the quartz oscillator.

KW - Optical fiber

KW - Photomechanical sensor

KW - Photothermal vibration

KW - Quartz core microstructure

KW - Vacuum gauge

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DO - 10.1016/0042-207x(96)00146-7

M3 - Article

AN - SCOPUS:0030170028

VL - 47

SP - 475

EP - 477

JO - Vacuum

JF - Vacuum

SN - 0042-207X

IS - 6-8

ER -

Pressure dependence of resonance characteristics of the microcantilever fabricated from optical fiber

Abstract

Keywords

ASJC Scopus subject areas

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