Pressure dependence of resonance characteristics of the microcantilever fabricated from optical fiber

H. Kumazaki, S. Inabaa, K. Hane

Research output: Contribution to journalArticlepeer-review

18 Citations (Scopus)

Abstract

A quartz core microcantilever was fabricated from an optical fiber tip and was vibrated photothermally by laser diode light through the optical fiber. The vibration of the cantilever is stable and complicated adjustment of the optical system is not necessary. Pressure dependence of the resonance curve was measured for cantilevers of various sizes, and evaluated using a "string-of-beads" model for the quartz oscillator.

Original languageEnglish
Pages (from-to)475-477
Number of pages3
JournalVacuum
Volume47
Issue number6-8
DOIs
Publication statusPublished - 1996

Keywords

  • Optical fiber
  • Photomechanical sensor
  • Photothermal vibration
  • Quartz core microstructure
  • Vacuum gauge

ASJC Scopus subject areas

  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films

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