Preparing 3D graphene nanowall-nickel hybrid electrode on quartz glass for on-chip micro-supercapacitors

Jinhua Li, Takahito Ono

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We report a type of MEMS-technique processable micro-supercapacitors built on 3D graphene nanowall (GNW)/Ni core-shell electrodes. While the growth of GNW on quartz glass and other conductive substrates were rationally revealed, the microfabrication of hybrid electrodes was realized by uniformly coating Ni on GNW to simultaneously serve as a shadow mask for patterning and an active material for capacitance augmentation. With 10-fold larger capacitance of 337 F/cm3 than that using pure GNW and Ni, the core-shell electrodes enabled a high on-chip energy and power density delivery of the capacitor. The non-catalytic growth and micromachining strategy possibly promote applying GNW in various microsystems.

Original languageEnglish
Title of host publication2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages861-864
Number of pages4
ISBN (Electronic)9781509050789
DOIs
Publication statusPublished - 2017 Feb 23
Event30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017 - Las Vegas, United States
Duration: 2017 Jan 222017 Jan 26

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume0
ISSN (Print)1084-6999

Other

Other30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017
CountryUnited States
CityLas Vegas
Period17/1/2217/1/26

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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