Preparation of ZrO2-film by oxidation of ZrCl4

Hisanori Yamane, Toshio Hirai

    Research output: Contribution to journalArticlepeer-review

    29 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)1229-1230
    Number of pages2
    JournalJournal of Materials Science Letters
    Volume6
    Issue number10
    DOIs
    Publication statusPublished - 1987 Oct 1

    ASJC Scopus subject areas

    • Materials Science(all)

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