Preparation of ZrO2-film by oxidation of ZrCl4

Hisanori Yamane, Toshio Hirai

Research output: Contribution to journalArticlepeer-review

29 Citations (Scopus)
Original languageEnglish
Pages (from-to)1229-1230
Number of pages2
JournalJournal of Materials Science Letters
Volume6
Issue number10
DOIs
Publication statusPublished - 1987 Oct 1

ASJC Scopus subject areas

  • Materials Science(all)

Cite this