Preparation of ZrO2 dielectric layers by subsequent oxidation after Zr film deposition with negative substrate bias voltage

Joon Woo Bae, Jae Won Lim, Sun Joong Kim, Kouji Mimura, Takamichi Miyazaki, Masahito Uchikoshi, Minoru Isshiki

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2 Citations (Scopus)

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Engineering & Materials Science

Chemical Compounds

Physics & Astronomy