Fingerprint
Dive into the research topics of 'Preparation of ZrO2 dielectric layers by subsequent oxidation after Zr film deposition with negative substrate bias voltage'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Preparation of ZrO2 dielectric layers by subsequent oxidation after Zr film deposition with negative substrate bias voltage
Joon Woo Bae, Jae Won Lim, Sun Joong Kim, Kouji Mimura, Takamichi Miyazaki, Masahito Uchikoshi, Minoru Isshiki
Research output: Contribution to journal › Article › peer-review
2
Citations
(Scopus)