TY - GEN
T1 - Preparation of titania solid films by laser CVD using CO2 laser
AU - Gao, Ming
AU - Ito, Akihiko
AU - Tu, Rong
AU - Goto, Takashi
PY - 2012
Y1 - 2012
N2 - Titania (TiO2) films having dense and solid microstructure were prepared by laser chemical vapor deposition using CO2 laser. The effects of deposition temperature (Tdep) and total chamber pressure (Ptot) on phase and microstructure of TiO2 films were investigated. At Ptot = 600 Pa and Tdep = 790 K, rutile TiO2 film had a polygonal platelet grains 2 μm in size. At P tot = 600 Pa and Tdep = 1010 K, rutile TiO2 film had (110) orientation and consisted of a truncated polyhedron 5-6 μm in size. At Ptot = 200 Pa and Tdep = 955 K, rutile TiO 2 film has a solid columnar having faceted surface. A dense and solid TiO2 film was obtained at Ptot = 200 Pa and T dep = 1120 K. The deposition rate of TiO2 solid film was reached 240 μm h-1.
AB - Titania (TiO2) films having dense and solid microstructure were prepared by laser chemical vapor deposition using CO2 laser. The effects of deposition temperature (Tdep) and total chamber pressure (Ptot) on phase and microstructure of TiO2 films were investigated. At Ptot = 600 Pa and Tdep = 790 K, rutile TiO2 film had a polygonal platelet grains 2 μm in size. At P tot = 600 Pa and Tdep = 1010 K, rutile TiO2 film had (110) orientation and consisted of a truncated polyhedron 5-6 μm in size. At Ptot = 200 Pa and Tdep = 955 K, rutile TiO 2 film has a solid columnar having faceted surface. A dense and solid TiO2 film was obtained at Ptot = 200 Pa and T dep = 1120 K. The deposition rate of TiO2 solid film was reached 240 μm h-1.
KW - Laser CVD
KW - Microstructure
KW - Solid film
UR - http://www.scopus.com/inward/record.url?scp=84859703224&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84859703224&partnerID=8YFLogxK
U2 - 10.4028/www.scientific.net/KEM.508.279
DO - 10.4028/www.scientific.net/KEM.508.279
M3 - Conference contribution
AN - SCOPUS:84859703224
SN - 9783037853764
T3 - Key Engineering Materials
SP - 279
EP - 282
BT - Materials Integration
PB - Trans Tech Publications Ltd
T2 - Int. Symposium of GCOE: Materials Integration, in Conjunction with the 2nd Int. Symposium on Advanced Synthesis and Processing Technology for Materials, ASPT 2011 and the 8th Materials Science School for Young Scientists, KINKEN-WAKATE 2011
Y2 - 1 December 2011 through 2 December 2011
ER -