Preparation of titania solid films by laser CVD using CO2 laser

Ming Gao, Akihiko Ito, Rong Tu, Takashi Goto

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

Titania (TiO2) films having dense and solid microstructure were prepared by laser chemical vapor deposition using CO2 laser. The effects of deposition temperature (Tdep) and total chamber pressure (Ptot) on phase and microstructure of TiO2 films were investigated. At Ptot = 600 Pa and Tdep = 790 K, rutile TiO2 film had a polygonal platelet grains 2 μm in size. At P tot = 600 Pa and Tdep = 1010 K, rutile TiO2 film had (110) orientation and consisted of a truncated polyhedron 5-6 μm in size. At Ptot = 200 Pa and Tdep = 955 K, rutile TiO 2 film has a solid columnar having faceted surface. A dense and solid TiO2 film was obtained at Ptot = 200 Pa and T dep = 1120 K. The deposition rate of TiO2 solid film was reached 240 μm h-1.

Original languageEnglish
Title of host publicationMaterials Integration
PublisherTrans Tech Publications Ltd
Pages279-282
Number of pages4
ISBN (Print)9783037853764
DOIs
Publication statusPublished - 2012
EventInt. Symposium of GCOE: Materials Integration, in Conjunction with the 2nd Int. Symposium on Advanced Synthesis and Processing Technology for Materials, ASPT 2011 and the 8th Materials Science School for Young Scientists, KINKEN-WAKATE 2011 - Sendai, Japan
Duration: 2011 Dec 12011 Dec 2

Publication series

NameKey Engineering Materials
Volume508
ISSN (Print)1013-9826
ISSN (Electronic)1662-9795

Other

OtherInt. Symposium of GCOE: Materials Integration, in Conjunction with the 2nd Int. Symposium on Advanced Synthesis and Processing Technology for Materials, ASPT 2011 and the 8th Materials Science School for Young Scientists, KINKEN-WAKATE 2011
CountryJapan
CitySendai
Period11/12/111/12/2

Keywords

  • Laser CVD
  • Microstructure
  • Solid film

ASJC Scopus subject areas

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

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