Preparation of pyrochlore Ca2Ti2O6 by metal-organic chemical vapor deposition

Mitsutaka Sato, Rong Tu, Takashi Goto

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5 Citations (Scopus)


Ca-Ti-O films were prepared by metal-organic chemical vapor deposition (MOCVD) using Ca(dpm)2 and Ti(O-i-Pr)2(dpm)2 precursor and the effects of substrate temperature (Tsub) and Ca/Ti ratio (R Ca/Ti) on the crystal structure and morphology were studied. Ca-Ti-O films consisting of pyrochlore Ca2Ti2O6 and perovskite CaTiO3 phase were obtained at Tsub = 1073 K and 0.35 < RCa/Ti < 1. The content of pyrochlore Ca 2Ti2O6 increased with decreasing R Ca/Ti. Pyrochlore Ca2Ti2O6 almost in a single phase was obtained at RCa/Ti = 0.46. The morphology of pyrochlore Ca2Ti2O6 was agglomerated fine grains about 50 nm in diameter having a columnar texture.

Original languageEnglish
Pages (from-to)2603-2605
Number of pages3
JournalMaterials Transactions
Issue number10
Publication statusPublished - 2006 Oct


  • Calcium titanate
  • Metal-organic chemical vapor deposition
  • Microstructure
  • Pyrochlore

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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