Preparation of multilayered film of polyimide nanoparticles for low-K applications

Gufan Zhao, Takayuki Ishizaka, Hitoshi Kasai, Hidetoshi Oikawa, Hachiro Nakanishi

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)

Abstract

In order to reduce dielectric constant of polyimide, preparation of porous films assembled by polyimide nanoparticles was investigated. We utilized the electrophoretic deposition of polyimide nanoparticles to prepare porous low dielectric constant (low-k) films possessing voids between particles. The films thickness was controlled in the range of 500nm5m by changing the dispersion concentration and applied voltage. Porous morphologies were confirmed by SEM observation. As a result, dielectric constant of the film decreased to 2.32, 14% lower than that of the bulk polyimide film, due to the introduction of air voids into the matrix. This is the first report showing a promising approach with high processability for porous low-k polyimide films.

Original languageEnglish
Pages (from-to)31/[613]-38/[620]
JournalMolecular crystals and liquid crystals
Volume464
Issue number1
DOIs
Publication statusPublished - 2006 Mar
Externally publishedYes

Keywords

  • Electrophoretic deposition
  • Low-k
  • Multilayered film
  • Polyimide nanoparticles
  • Reprecipitation method

ASJC Scopus subject areas

  • Chemistry(all)
  • Materials Science(all)
  • Condensed Matter Physics

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