MgIn2O4-X thin films were deposited onto a silica glass plate by the RF sputtering method. The highest conductivity observed for the film post-annealed under H2 flow was 2.3ȕ102 S/cm, with a carrier concentration of 6.3ȕ1020 cm-3 and a mobility of 2.2 cm2 ƃV-1ƃs-1. No distinct optical absorption band was observed in the visible region.
ASJC Scopus subject areas
- Physics and Astronomy(all)