Preparation of Magnéli phases of Ti27O52 and Ti6O11 films by laser chemical vapor deposition

Rong Tu, Guangsheng Huo, Teiichi Kimura, Takashi Goto

Research output: Contribution to journalArticle

15 Citations (Scopus)

Abstract

Magnéli phases of Ti27O52 and Ti 6O11 films were prepared by laser chemical vapor deposition using Ti(dpm)2(O-i-Pr)2 as a precursor. Ti 6O11 film was obtained at a laser power (PL) of 200 W and a deposition temperature (Tdep) of 1270 K. Ti 27O52 film was obtained at PL = 150 to 200 W and Tdep = 1120 to 1250 K. Ti6O11 and Ti 27O52 films had a faceted texture about 2 μm in grain size and a columnar cross section. The deposition rate of Ti27O 52 and Ti6O11 films were 90 and 70 μm h - 1, respectively.

Original languageEnglish
Pages (from-to)6927-6932
Number of pages6
JournalThin Solid Films
Volume518
Issue number23
DOIs
Publication statusPublished - 2010 Sep 30

Keywords

  • Laser chemical vapor deposition
  • Magnéli phase
  • Titanium oxide
  • Transmission electron microscopy
  • X-ray diffraction

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

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