Preparation of lead zirconate titanate thin films derived by hybrid processing: Sol-gel method and laser ablation

Zhan Jie Wang, Isao Karibe, Ryutaro Maeda, Hiroyuki Kokawa

Research output: Contribution to journalArticlepeer-review

32 Citations (Scopus)

Abstract

Thin films of Pb(Zr0.52Ti0.48)O3 (PZT) were prepared by hybrid processing (sol-gel and excimer laser ablation) on Pt/Ti/SiO2/Si substrates. Crystalline phases and microstructures of the PZT films were investigated by X-ray diffraction analysis and scanning electron microscopy, respectively. Electrical properties of the films were evaluated by measuring their P-E hysteresis loops and dielectric constants. The temperature of postdeposition annealing in hybrid processing was lower than that in the case of direct film deposition by laser ablation on a Pt/Ti/SiO2/Si substrate. The preferred orientation of the films derived by hybrid processing could be controlled using the seeding layer deposited by the sol-gel process. The films fabricated by hybrid processing consisted of the perovskite phase with a (111) preferred orientation and had good ferroelectric properties.

Original languageEnglish
Pages (from-to)3108-3110
Number of pages3
JournalJournal of the American Ceramic Society
Volume85
Issue number12
Publication statusPublished - 2002 Dec 1

ASJC Scopus subject areas

  • Ceramics and Composites
  • Materials Chemistry

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