Abstract
(100)-oriented stoichiometric LSCO films were deposited on Pt/TiO2/SiO2/Si, TiO2/Pt/TiO2/SiO2/Si and Si substrates with rf magnetron sputtering using a single self fabricated oxide target. Best conductive LSCO film was obtained at 600°C, yielding a specific resistivity of 90 μΩcm. The PZT film deposited on the LSCO(100) electrode oriented to (100) or (001). Maximum value of d33 coefficient was 73.5 pm/V.
Original language | English |
---|---|
Pages (from-to) | 335-341 |
Number of pages | 7 |
Journal | Ferroelectrics |
Volume | 225 |
Issue number | 1-4 |
DOIs | |
Publication status | Published - 1999 Jan 1 |
Externally published | Yes |
Keywords
- Electrodes
- LaSrCoO
- PZT
- RF magnetron sputtering
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics