Preparation of La1-xSrxCoO3 electrodes for ferroelectric thin films by RF magnetron sputtering

Hiroshi Masumoto; Stéphane Hiboux; Paul Muralt

doi:10.1080/00150199908009143

Preparation of La_1-xSr_xCoO₃ electrodes for ferroelectric thin films by RF magnetron sputtering

Hiroshi Masumoto, Stéphane Hiboux, Paul Muralt

Research output: Contribution to journal › Article › peer-review

1 Citation (Scopus)

Abstract

(100)-oriented stoichiometric LSCO films were deposited on Pt/TiO₂/SiO₂/Si, TiO₂/Pt/TiO₂/SiO₂/Si and Si substrates with rf magnetron sputtering using a single self fabricated oxide target. Best conductive LSCO film was obtained at 600°C, yielding a specific resistivity of 90 μΩcm. The PZT film deposited on the LSCO(100) electrode oriented to (100) or (001). Maximum value of d₃₃ coefficient was 73.5 pm/V.

Original language	English
Pages (from-to)	335-341
Number of pages	7
Journal	Ferroelectrics
Volume	225
Issue number	1-4
DOIs	https://doi.org/10.1080/00150199908009143
Publication status	Published - 1999
Externally published	Yes

Keywords

Electrodes
LaSrCoO
PZT
RF magnetron sputtering

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics

Access to Document

10.1080/00150199908009143

Cite this

@article{faa37613df3a4d07a2c055232259f6ad,

title = "Preparation of La1-xSrxCoO3 electrodes for ferroelectric thin films by RF magnetron sputtering",

abstract = "(100)-oriented stoichiometric LSCO films were deposited on Pt/TiO2/SiO2/Si, TiO2/Pt/TiO2/SiO2/Si and Si substrates with rf magnetron sputtering using a single self fabricated oxide target. Best conductive LSCO film was obtained at 600°C, yielding a specific resistivity of 90 μΩcm. The PZT film deposited on the LSCO(100) electrode oriented to (100) or (001). Maximum value of d33 coefficient was 73.5 pm/V.",

keywords = "Electrodes, LaSrCoO, PZT, RF magnetron sputtering",

author = "Hiroshi Masumoto and St{\'e}phane Hiboux and Paul Muralt",

note = "Funding Information: The help of Jacques Castano in preparing the targets is acknowledged. This work was supported by the Swiss Priority Program on Materials Research.",

year = "1999",

doi = "10.1080/00150199908009143",

language = "English",

volume = "225",

pages = "335--341",

journal = "Ferroelectrics",

issn = "0015-0193",

publisher = "Taylor and Francis Ltd.",

number = "1-4",

}

TY - JOUR

T1 - Preparation of La1-xSrxCoO3 electrodes for ferroelectric thin films by RF magnetron sputtering

AU - Masumoto, Hiroshi

AU - Hiboux, Stéphane

AU - Muralt, Paul

N1 - Funding Information: The help of Jacques Castano in preparing the targets is acknowledged. This work was supported by the Swiss Priority Program on Materials Research.

PY - 1999

Y1 - 1999

N2 - (100)-oriented stoichiometric LSCO films were deposited on Pt/TiO2/SiO2/Si, TiO2/Pt/TiO2/SiO2/Si and Si substrates with rf magnetron sputtering using a single self fabricated oxide target. Best conductive LSCO film was obtained at 600°C, yielding a specific resistivity of 90 μΩcm. The PZT film deposited on the LSCO(100) electrode oriented to (100) or (001). Maximum value of d33 coefficient was 73.5 pm/V.

AB - (100)-oriented stoichiometric LSCO films were deposited on Pt/TiO2/SiO2/Si, TiO2/Pt/TiO2/SiO2/Si and Si substrates with rf magnetron sputtering using a single self fabricated oxide target. Best conductive LSCO film was obtained at 600°C, yielding a specific resistivity of 90 μΩcm. The PZT film deposited on the LSCO(100) electrode oriented to (100) or (001). Maximum value of d33 coefficient was 73.5 pm/V.

KW - Electrodes

KW - LaSrCoO

KW - PZT

KW - RF magnetron sputtering

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U2 - 10.1080/00150199908009143

DO - 10.1080/00150199908009143

M3 - Article

AN - SCOPUS:0004271490

VL - 225

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EP - 341

JO - Ferroelectrics

JF - Ferroelectrics

SN - 0015-0193

IS - 1-4

ER -