(100)-oriented stoichiometric LSCO films were deposited on Pt/TiO2/SiO2/Si, TiO2/Pt/TiO2/SiO2/Si and Si substrates with rf magnetron sputtering using a single self fabricated oxide target. Best conductive LSCO film was obtained at 600°C, yielding a specific resistivity of 90 μΩcm. The PZT film deposited on the LSCO(100) electrode oriented to (100) or (001). Maximum value of d33 coefficient was 73.5 pm/V.
- RF magnetron sputtering
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics