Preparation of La1-xSrxCoO3 electrodes for ferroelectric thin films by RF magnetron sputtering

Hiroshi Masumoto, Stéphane Hiboux, Paul Muralt

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)

Abstract

(100)-oriented stoichiometric LSCO films were deposited on Pt/TiO2/SiO2/Si, TiO2/Pt/TiO2/SiO2/Si and Si substrates with rf magnetron sputtering using a single self fabricated oxide target. Best conductive LSCO film was obtained at 600°C, yielding a specific resistivity of 90 μΩcm. The PZT film deposited on the LSCO(100) electrode oriented to (100) or (001). Maximum value of d33 coefficient was 73.5 pm/V.

Original languageEnglish
Pages (from-to)335-341
Number of pages7
JournalFerroelectrics
Volume225
Issue number1-4
DOIs
Publication statusPublished - 1999
Externally publishedYes

Keywords

  • Electrodes
  • LaSrCoO
  • PZT
  • RF magnetron sputtering

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

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