Preparation of iridium and platinum films by MOCVD and their properties

T. Goto, R. Vargas, T. Hirai

Research output: Contribution to journalConference articlepeer-review

37 Citations (Scopus)


Noble metals (Ir, Pt) films were prepared by MOCVD using metal-acetylacetonate precursors. The effects of deposition conditions on depositions rates, composition and microstructure were studied, and the optimum conditions were determined. A small amount of oxygen addition to the source gas was effective to prepare high-purity films. Epitaxially grown films were obtained on several kinds of single crystalline substrates. Black-colored powdery films containing impurity carbon were prepared without oxygen addition. These black films consists of fine particles about several nanometer in size. Ir films prepared without oxygen addition showed superior electrical and catalytic properties as an electrode for zirconia solid electrolytes particularly below 600°C.

Original languageEnglish
Pages (from-to)297-304
Number of pages8
JournalJournal De Physique. IV : JP
Issue number3
Publication statusPublished - 1993
Externally publishedYes
EventProceedings of the 9th European Conference on Chemical Vapour Deposition - Tampere, Finl
Duration: 1993 Aug 221993 Aug 27

ASJC Scopus subject areas

  • Physics and Astronomy(all)


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