Preparation of hydroxyapatite and calcium phosphate films by MOCVD

Mitsutaka Sato; Rong Tu; Takashi Goto

doi:10.2320/matertrans.MRA2007145

Preparation of hydroxyapatite and calcium phosphate films by MOCVD

Mitsutaka Sato, Rong Tu, Takashi Goto

Materials Design Division

Research output: Contribution to journal › Article › peer-review

18 Citations (Scopus)

Abstract

Ca-P-O films were prepared by MOCVD using Ca(dpm)₂ and (C ₆H₅O)₃PO precursors. The crystal phase changed with changing deposition conditions of substrate temperature (T_sub), total pressure (P_tot) and molar ratio of Ca and P precursors (R _Ca/P). α-tricalcium phosphate (γ-Ca₃(PO ₄)₂) in a single phase was obtained at Y_sub = 973K, R_Ca/P < 0.3 and T_sub = 1073K, R_Ca/P = 0.1 to 0.5. Hydroxyapatite (Ca₁₀(PO₄)₆(OH) ₂) in a single phase was first prepared by MOCVD at T_sub = 973 K, R_Ca/P = 0.5 and T_sub = 1073 K, R_Ca/P = 0.8 to 1. The maximum deposition rate of α-TCP and HAp films in a single phase were 6.0 and 4.0nms^-1 at P_wt = 0.8 kPa and T _sub = 1073 K, respectively.

Original language	English
Pages (from-to)	3149-3153
Number of pages	5
Journal	Materials Transactions
Volume	48
Issue number	12
DOIs	https://doi.org/10.2320/matertrans.MRA2007145
Publication status	Published - 2007 Dec

Keywords

Crystal structure
Deposition rate
Metal-organic chemical vapor deposition, calcium phosphate
Microstructure

ASJC Scopus subject areas

Materials Science(all)
Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering

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title = "Preparation of hydroxyapatite and calcium phosphate films by MOCVD",

abstract = "Ca-P-O films were prepared by MOCVD using Ca(dpm)2 and (C 6H5O)3PO precursors. The crystal phase changed with changing deposition conditions of substrate temperature (Tsub), total pressure (Ptot) and molar ratio of Ca and P precursors (R Ca/P). α-tricalcium phosphate (γ-Ca3(PO 4)2) in a single phase was obtained at Ysub = 973K, RCa/P < 0.3 and Tsub = 1073K, RCa/P = 0.1 to 0.5. Hydroxyapatite (Ca10(PO4)6(OH) 2) in a single phase was first prepared by MOCVD at Tsub = 973 K, RCa/P = 0.5 and Tsub = 1073 K, RCa/P = 0.8 to 1. The maximum deposition rate of α-TCP and HAp films in a single phase were 6.0 and 4.0nms-1 at Pwt = 0.8 kPa and T sub = 1073 K, respectively.",

keywords = "Crystal structure, Deposition rate, Metal-organic chemical vapor deposition, calcium phosphate, Microstructure",

author = "Mitsutaka Sato and Rong Tu and Takashi Goto",

year = "2007",

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doi = "10.2320/matertrans.MRA2007145",

language = "English",

volume = "48",

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AU - Sato, Mitsutaka

AU - Tu, Rong

AU - Goto, Takashi

PY - 2007/12

Y1 - 2007/12

N2 - Ca-P-O films were prepared by MOCVD using Ca(dpm)2 and (C 6H5O)3PO precursors. The crystal phase changed with changing deposition conditions of substrate temperature (Tsub), total pressure (Ptot) and molar ratio of Ca and P precursors (R Ca/P). α-tricalcium phosphate (γ-Ca3(PO 4)2) in a single phase was obtained at Ysub = 973K, RCa/P < 0.3 and Tsub = 1073K, RCa/P = 0.1 to 0.5. Hydroxyapatite (Ca10(PO4)6(OH) 2) in a single phase was first prepared by MOCVD at Tsub = 973 K, RCa/P = 0.5 and Tsub = 1073 K, RCa/P = 0.8 to 1. The maximum deposition rate of α-TCP and HAp films in a single phase were 6.0 and 4.0nms-1 at Pwt = 0.8 kPa and T sub = 1073 K, respectively.

AB - Ca-P-O films were prepared by MOCVD using Ca(dpm)2 and (C 6H5O)3PO precursors. The crystal phase changed with changing deposition conditions of substrate temperature (Tsub), total pressure (Ptot) and molar ratio of Ca and P precursors (R Ca/P). α-tricalcium phosphate (γ-Ca3(PO 4)2) in a single phase was obtained at Ysub = 973K, RCa/P < 0.3 and Tsub = 1073K, RCa/P = 0.1 to 0.5. Hydroxyapatite (Ca10(PO4)6(OH) 2) in a single phase was first prepared by MOCVD at Tsub = 973 K, RCa/P = 0.5 and Tsub = 1073 K, RCa/P = 0.8 to 1. The maximum deposition rate of α-TCP and HAp films in a single phase were 6.0 and 4.0nms-1 at Pwt = 0.8 kPa and T sub = 1073 K, respectively.

KW - Crystal structure

KW - Deposition rate

KW - Metal-organic chemical vapor deposition, calcium phosphate

KW - Microstructure

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Preparation of hydroxyapatite and calcium phosphate films by MOCVD

Abstract

Keywords

ASJC Scopus subject areas

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