Preparation of hydrogenated amorphous silicon by ECR plasma sputtering and the effect on retinoic acid and membrane protein polypeptides

Yutaka Tsujiuchi, Junya Suto, Kenji Goto, Shigeki Shibata, Tadashi Ishimaru, Manabu Ihara, Hiroshi Masumoto, Takashi Goto

Research output: Contribution to journalConference article

6 Citations (Scopus)

Abstract

Thin films of amorphous silicon and hydrogenated amorphous silicon were prepared by ECR plasma sputtering and their characteristics are studied. These films exhibited several amorphous states and smoothness of less than 0.8 nm. Langmuir-Blodgett (LB) films of retinoic acid or polypeptide including the alpha helix region of membrane protein were jointed with these amorphous silicon films. The hybrid films exhibited an oriented arrangement of molecules. The UV absorption spectrum of the LB films of retinoic acid based on hydrogenated amorphous silicon films exhibited a novel absorption at the wavelength 500 nm not reported before.

Original languageEnglish
Pages (from-to)90-96
Number of pages7
JournalThin Solid Films
Volume438-439
DOIs
Publication statusPublished - 2003 Aug 22
EventThe 5th International Conference on Nano-Molecular Electronics - Kobe, Japan
Duration: 2002 Dec 102002 Dec 12

Keywords

  • ECR plasma sputtering
  • Hydrogenated amorphous silicon
  • Langmuir-Blodgett films
  • Membrane protein polypeptide
  • Retinoic acid
  • Smoothness

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

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