Preparation of graphene-nickel nanocomposite for durable micromirror application

Jinhua Li, Zhonglie An, Takahito Ono

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper reports the fabrication of a silicon micromirror with graphene-nickel (Ni) nanocomposite beams, and evaluate the mechanical stability of the mirror in terms of resonant frequency. A novel pulse-reversed electroplating method is developed for synthesizing the nanocomposite with uniformly dispersed and high loading content of graphene. The indentation hardness and Young's modulus of the composite are enhanced by 3.5-fold and 1.4-fold, respectively, in the presence of graphene filler. During a long-term stability test, the composite micromirror shows scanning angle of ∼17° with less resonant frequency variation of 0.68% than that of 1.47% in pure Ni counterpart. It demonstrates, for the first time, the potential of graphene-Ni nanocomposite in micromechanical system applications.

Original languageEnglish
Title of host publicationMEMS 2016 - 29th IEEE International Conference on Micro Electro Mechanical Systems
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages554-557
Number of pages4
ISBN (Electronic)9781509019731
DOIs
Publication statusPublished - 2016 Feb 26
Event29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016 - Shanghai, China
Duration: 2016 Jan 242016 Jan 28

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume2016-February
ISSN (Print)1084-6999

Other

Other29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016
Country/TerritoryChina
CityShanghai
Period16/1/2416/1/28

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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