Preparation of functionally graded bio-ceramic film by MOCVD

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

Functionally graded Ca-Ti-O/Ca-P-O films were prepared by MOCVD. The phases, composition and morphology of Ca-Ti-O and Ca-P-O films changed depending on the molar ratio of each precursors, total pressure (Ptot) and substrate temperature (Tsub). CaTiO3 films in a single phase were obtained at Tsub = 973 and 1073 K. CaTiO3 films prepared at 873 K had a dense and smooth surface, whereas that prepared at Tsub = 1073 K had complicated rough surface with a cauliflower-like texture. The graded texture of CaTiO3 films from columnar to fine grains was advantageous to good adherence for metal substrates. α-TCP and HAp films in a single phase were obtained at Tsub = 973 and 1073 K. Both α-TCP and HAp films had a dense and smooth surface. The maximum deposition rate of Ca-Ti-O and Ca-P-O films were 44 and 20 μm/h, respectively, and several 10 times grater than that of sputtering method. Apatite formation rate strongly depended on the surface morphology of film. Apatite formed after 3 days on the CaTiO3 film, 14 days on the α-TCP film and 6 hours on the HAp film in a Hanks' solution.

Original languageEnglish
Title of host publicationMultiscale, Multifunctional and Functionally Graded Materials
PublisherTrans Tech Publications Ltd
Pages193-198
Number of pages6
ISBN (Print)0878493077, 9780878493074
DOIs
Publication statusPublished - 2010
Event10th International Symposium on Multiscale, Multifunctional and Functionally Graded Materials, MM and FGMs - Sendai, Japan
Duration: 2008 Sep 222008 Sep 25

Publication series

NameMaterials Science Forum
Volume631-632
ISSN (Print)0255-5476
ISSN (Electronic)1662-9752

Other

Other10th International Symposium on Multiscale, Multifunctional and Functionally Graded Materials, MM and FGMs
CountryJapan
CitySendai
Period08/9/2208/9/25

Keywords

  • Calcium titanate
  • Hydroxyapatite
  • Metal organic chemical vapor deposition
  • α-tricalcium phosphate

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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