Preparation of epitaxial AlN films by electron cyclotron resonance plasma-assisted chemical vapor deposition on Ir- and Pt-coated sapphire substrates

Wei Zhang, Roberto Vargas, Takashi Goto, Yoshihiro Someno, Toshio Hirai

Research output: Contribution to journal › Article › peer-review

35 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Preparation of epitaxial AlN films by electron cyclotron resonance plasma-assisted chemical vapor deposition on Ir- and Pt-coated sapphire substrates'. Together they form a unique fingerprint.

Material Science

Engineering

Physics

Medicine and Dentistry

Chemistry