Preparation of cubic and tetragonal Li7La3Zr2O12 film by metal organic chemical vapor deposition

H. Katsui, T. Goto

Research output: Contribution to journalArticlepeer-review

40 Citations (Scopus)


Li7La3Zr2O12 films were prepared on polycrystalline Al2O3 by metal organic chemical vapor deposition. The effect of deposition temperature (Tsub) on the phase formation, morphology and deposition rates was investigated. Tetragonal Li7La3Zr2O12 film formed at Tsub = 1023-1173 K. The morphology changed from small-sized granular, polygonally faceted granular to flat and smooth surface with increasing Tsub. Cubic Li7La3Zr2O12 film with fine granular surface was deposited at Tsub = 1173-1223 K. The deposition rates of the cubic and tetragonal Li7La3Zr2O12 films were approximately 20 μm h- 1, which were one to two orders of magnitude greater than those of Li7La3Zr2O12 films by pulsed laser deposition.

Original languageEnglish
Pages (from-to)130-134
Number of pages5
JournalThin Solid Films
Publication statusPublished - 2015 Jun 1


  • Cubic structure
  • Deposition rate
  • Lanthanum zirconate
  • Lithium lanthanum zirconate
  • Metal organic chemical vapor deposition
  • Tetragonal structure

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry


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