Preparation of clean and well-ordered hydrogen-terminated Si(1 1 0)-(1 × 1) surfaces and the measurements of vibrational modes

S. Suto, K. Matsui, S. Y. Matsushita, H. Kato, H. Nakaya, T. Taoka, A. Kasuya, T. Yamada

Research output: Contribution to journalArticlepeer-review

6 Citations (Scopus)

Abstract

We propose electrochemical and wet chemical processes to prepare the clean and well-ordered hydrogen-terminated Si(1 1 0)-(1 × 1) surfaces, with our evaluation by low-energy electron-diffraction (LEED), high-resolution electron-energy-loss spectroscopy (HREELS) and X-ray photoelectron spectroscopy (XPS). Clear (1 × 1) LEED patterns indicated the two-dimensional space group of p2mg. The intrinsic SiH bending and stretching modes and surface phonon modes, as well as hydrocarbon impurities were observed by HREELS. Among the procedures tested, the electrochemical etching in a NH 4 F solution yielded the best ordered surface. The wet chemical etching produced the clean samples suitable for HREELS measurements.

Original languageEnglish
Pages (from-to)90-92
Number of pages3
JournalApplied Surface Science
Volume267
DOIs
Publication statusPublished - 2013 Feb 15

Keywords

  • Etching
  • HREELS
  • LEED
  • Si(1 1 0)
  • p2mg

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Physics and Astronomy(all)
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

Fingerprint Dive into the research topics of 'Preparation of clean and well-ordered hydrogen-terminated Si(1 1 0)-(1 × 1) surfaces and the measurements of vibrational modes'. Together they form a unique fingerprint.

Cite this