Preparation of Ca-Ti-O/Ca-P-O functionally graded bio-ceramic film by MOCVD

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1 Citation (Scopus)

Abstract

Ca-Ti-O and Ca-P-O films were prepared by MOCVD. The phases, composition and morphology of Ca-Ti-O and Ca-P-O films changed depending on the molar ratio of Ca to Ti (RCa/Ti) and Ca to P (RCa/P) precursors, total pressure (Ptot) and substrate temperature (Tsub). CaTiO3 films in a single phase were obtained at Tsub=973 and 1073 K. CaTiO3 films prepared at Tsub= 873 K had a dense and smooth surface. CaTiO3 films prepared at Tsub= 1073 K had complicated rough surface with a cauliflower-like texture. α-TCP and HAp films in a single phase were obtained at Tsub, = 973 and 1073 K, and both films had dense microstructure. Apatite formed after 3 days on the CaTiO3 film, while 14 days on the a-TCP film and 6 hours on the HAp film, respectively. Functionally graded Ca-Ti-O/Ca-P-O films were successfully prepared by MOCVD, and expected to have good bone conductivity and adherence to Ti substrate.

Original languageEnglish
Pages (from-to)325-330
Number of pages6
JournalFuntai Oyobi Fummatsu Yakin/Journal of the Japan Society of Powder and Powder Metallurgy
Volume55
Issue number5
DOIs
Publication statusPublished - 2008 May

Keywords

  • CaTiO
  • HAp
  • Hanks' solution
  • Metal-organic chemical vapor deposition
  • α-TCP

ASJC Scopus subject areas

  • Mechanical Engineering
  • Industrial and Manufacturing Engineering
  • Metals and Alloys
  • Materials Chemistry

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