Preparation of Ba-Ti-O films by laser chemical vapor deposition

Akihiko Ito, Dongyun Guo, Rong Tu, Takashi Goto

Research output: Contribution to journalArticlepeer-review

9 Citations (Scopus)

Abstract

Ba-Ti-O films were prepared on Pt-coated Si substrate by laser chemical vapor deposition, and their orientations and microstructures were compared. Ba 2TiO 4, BaTiO 3, BaTi 2O 5, Ba 4Ti 13O 30 and BaTi 4O 9 single-phase films were prepared at Ti to Ba molar ratio from 0.41 to 3.49. The α′-Ba 2TiO 4 film showed (0 1 0) and (0 9 1) co-orientation with elongated, truncated columnar grains. The BaTiO 3 film was composed of triangular and hexagonal grains with slight (1 1 1) orientation. The BaTi 2O 5 film had (0 1 0) orientation and faceted columnar grains. The Ba 4Ti 13O 40 film showed (1 0 0) and (0 1 2) co-orientation with shellfish-like grains. The BaTi 4O 9 film showed (0 1 0) orientation with slightly rounded faceted columnar grains. The deposition rates of Ba-Ti-O films ranged from 30 to 144 μm h -1.

Original languageEnglish
Pages (from-to)398-404
Number of pages7
JournalMaterials Chemistry and Physics
Volume133
Issue number1
DOIs
Publication statusPublished - 2012 Mar 15

Keywords

  • A. Ceramics
  • A. Inorganic compound
  • B. Chemical vapor deposition
  • D. Microstructure

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics

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