The temperature dependence of step/terrace surfaces of rutile TiO 2(110) substrates, prepared by chemical etching and thermal annealing, was examined by scanning tunneling microscopy, low-energy electron diffraction, and Auger electron spectroscopy in ultrahigh vacuum. Whereas disordered step/terrace structures appeared when the sample was heated at temperatures in the range 675-850 °C, we have succeeded in obtaining atomically flat and clean TiO2(110) (1 × 1) surfaces following annealing at 900 °C. Additional heating of the atomically-ordered surfaces at lower temperatures induced no structural changes. This simple approach is an important starting point for the further growth of oxide epitaxial layers.
ASJC Scopus subject areas
- Physics and Astronomy(all)