Preparation of a thin silicon nitride layer by photo-CVD and its application to inp misfet's

Seiichi Takahashi, Tokio Nakada, Kiichi Kamimura, Hideaki Zama, Takeo Hattori, Akio Kunioka

Research output: Contribution to journalArticlepeer-review

5 Citations (Scopus)

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Engineering & Materials Science

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