Preparation of a new photodegradable copolymer LB film and its application to photopatterning

Tiesheng Li, Masaya Mitsuishi, Tokuji Miyashita

Research output: Contribution to journalArticle

8 Citations (Scopus)

Abstract

A new type of copolymer LB film containing a photodegradable monomer, tert-butyl 4-vinylphenyl carbonate (tBVPC), was prepared. It was found that the p(DDA/tBVPC) LB film could be efficiently decomposed by deep UV irradiation. After development with an alkali solution a positive-tone pattern could be drawn with a high resolution of 0.75 μm.

Original languageEnglish
Pages (from-to)608-609
Number of pages2
JournalChemistry Letters
Issue number6
DOIs
Publication statusPublished - 2000 Jan 1

ASJC Scopus subject areas

  • Chemistry(all)

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