Preparation of a long superconducting NbN wire by rf sputtering method

H. Morita, K. Watanabe, K. Noto, H. Fujimori

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

Thin films were prepared by a rf reactive sputtering method as a preliminary experiment for preparing long Bl-NbN wire. Optimum sputtering conditions were experimentally assessed by measuring the dependence of critical temperature and critical current density on process parameters such as nitrogen and argon partial pressure, rf discharge power, substrate temperature, and sample thickness.

Original languageEnglish
Title of host publicationAdvances in Cryogenic Engineering
PublisherPubl by Plenum Publ Corp
Pages829-834
Number of pages6
ISBN (Print)0306428016
Publication statusPublished - 1988 Dec 1
EventProceedings of the Seventh International Cryogenic Materials Conference - ICMC - St. Charles, IL, USA
Duration: 1987 Jun 141987 Jun 18

Publication series

NameAdvances in Cryogenic Engineering
Volume34
ISSN (Print)0065-2482

Other

OtherProceedings of the Seventh International Cryogenic Materials Conference - ICMC
CitySt. Charles, IL, USA
Period87/6/1487/6/18

ASJC Scopus subject areas

  • Engineering(all)

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  • Cite this

    Morita, H., Watanabe, K., Noto, K., & Fujimori, H. (1988). Preparation of a long superconducting NbN wire by rf sputtering method. In Advances in Cryogenic Engineering (pp. 829-834). (Advances in Cryogenic Engineering; Vol. 34). Publ by Plenum Publ Corp.