TY - GEN
T1 - Preparation of a long superconducting NbN wire by rf sputtering method
AU - Morita, H.
AU - Watanabe, K.
AU - Noto, K.
AU - Fujimori, H.
PY - 1988/12/1
Y1 - 1988/12/1
N2 - Thin films were prepared by a rf reactive sputtering method as a preliminary experiment for preparing long Bl-NbN wire. Optimum sputtering conditions were experimentally assessed by measuring the dependence of critical temperature and critical current density on process parameters such as nitrogen and argon partial pressure, rf discharge power, substrate temperature, and sample thickness.
AB - Thin films were prepared by a rf reactive sputtering method as a preliminary experiment for preparing long Bl-NbN wire. Optimum sputtering conditions were experimentally assessed by measuring the dependence of critical temperature and critical current density on process parameters such as nitrogen and argon partial pressure, rf discharge power, substrate temperature, and sample thickness.
UR - http://www.scopus.com/inward/record.url?scp=0024129260&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0024129260&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:0024129260
SN - 0306428016
T3 - Advances in Cryogenic Engineering
SP - 829
EP - 834
BT - Advances in Cryogenic Engineering
PB - Publ by Plenum Publ Corp
T2 - Proceedings of the Seventh International Cryogenic Materials Conference - ICMC
Y2 - 14 June 1987 through 18 June 1987
ER -