Abstract
Thin films were prepared by a rf reactive sputtering method as a preliminary experiment for preparing long Bl-NbN wire. Optimum sputtering conditions were experimentally assessed by measuring the dependence of critical temperature and critical current density on process parameters such as nitrogen and argon partial pressure, rf discharge power, substrate temperature, and sample thickness.
| Original language | English |
|---|---|
| Title of host publication | Advances in Cryogenic Engineering |
| Publisher | Publ by Plenum Publ Corp |
| Pages | 829-834 |
| Number of pages | 6 |
| ISBN (Print) | 0306428016 |
| Publication status | Published - 1988 Dec 1 |
| Event | Proceedings of the Seventh International Cryogenic Materials Conference - ICMC - St. Charles, IL, USA Duration: 1987 Jun 14 → 1987 Jun 18 |
Publication series
| Name | Advances in Cryogenic Engineering |
|---|---|
| Volume | 34 |
| ISSN (Print) | 0065-2482 |
Other
| Other | Proceedings of the Seventh International Cryogenic Materials Conference - ICMC |
|---|---|
| City | St. Charles, IL, USA |
| Period | 87/6/14 → 87/6/18 |
ASJC Scopus subject areas
- Engineering(all)
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Cite this
Morita, H., Watanabe, K., Noto, K., & Fujimori, H. (1988). Preparation of a long superconducting NbN wire by rf sputtering method. In Advances in Cryogenic Engineering (pp. 829-834). (Advances in Cryogenic Engineering; Vol. 34). Publ by Plenum Publ Corp.