Preparation of (100)-oriented CeO2 film on (100) MgO single crystal substrate by laser chemical vapor deposition using solid precursor

Pei Zhao, Zhiliang Huang, Yangwu Mao, Ying Wang, Goto Takashi

Research output: Contribution to journalArticle

9 Citations (Scopus)

Abstract

(100)-oriented CeO2 films were prepared on (100) MgO single crystal substrate by laser chemical vapor deposition. A (100)-oriented CeO2 film showed a full width at half maximum value of 1.0° of the ω-scan on the (200) reflection and that of 2.1° of the φ-scan on the (220) reflection, respectively. The (100)-oriented CeO2 films showed cube-on-cube epitaxial growth and had rectangular grains in surface and columnar grains in cross section. The deposition rate of the (100)-oriented CeO2 films were 16-24 μm h-1.

Original languageEnglish
Pages (from-to)15919-15923
Number of pages5
JournalCeramics International
Volume40
Issue number10
DOIs
Publication statusPublished - 2014 Dec 1

Keywords

  • CeO film
  • High depostion rate
  • Laser chemical vapor deposition

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Ceramics and Composites
  • Process Chemistry and Technology
  • Surfaces, Coatings and Films
  • Materials Chemistry

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