Preparation of (100) CeO2 and (110) YBa2Cu 3O7-δ films by laser chemical vapor deposition

Pei Zhao, Akihiko Ito, Takashi Goto

Research output: Contribution to journalArticlepeer-review

5 Citations (Scopus)


CeO2 and YBa2Cu3O7-δ (YBCO) films were prepared by laser chemical vapor deposition. The (100)-oriented CeO2 films prepared at 975-1088 K consisted of columnar grains with pyramidal caps of the CeO2 {111} planes. The deposition rate was 3.0-5.4 μm h-1. The (110)-oriented YBCO films were prepared on the (100)-oriented CeO2 films at a deposition temperature of 1004 K. The (110)-oriented YBCO films showed wedge-shaped grains.

Original languageEnglish
Pages (from-to)605-609
Number of pages5
JournalCeramics International
Issue number1 PART A
Publication statusPublished - 2014 Jan


  • A. Film
  • Laser CVD
  • Orientation control
  • YBCO

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Ceramics and Composites
  • Process Chemistry and Technology
  • Surfaces, Coatings and Films
  • Materials Chemistry


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