Preparation of α-Al2O3/TiN multilayer coating on Ti(C,N)-based cermet by laser CVD

Yu You, Akihiko Ito, Rong Tu, Takashi Goto

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

α-Al2O3 and α-Al2O 3/TiN multilayer films were prepared on Ti(C,N)-based cermet substrate by laser chemical vapor deposition.α-Al2O3 and NaCl-type TiN films were prepared at Tdep = 1148 K. α-Al2O3/TiN multilayer film showed dense structure of cross section, and its surface morphology consisted of aggregated spherical grains. The adhesion of α-Al2O3/TiN multilayer film prepared on Ti(C,N)-based cermet was higher as compared with α-Al 2O3 film directly prepared on the cermet.

Original languageEnglish
Title of host publicationAdvanced Engineering Ceramics and Composites
PublisherTrans Tech Publications Ltd
Pages188-191
Number of pages4
ISBN (Print)9783037851814
DOIs
Publication statusPublished - 2011

Publication series

NameKey Engineering Materials
Volume484
ISSN (Print)1013-9826
ISSN (Electronic)1662-9795

Keywords

  • Adhesion
  • Alumina coating
  • Laser CVD
  • Ti(C,N)-based cermet

ASJC Scopus subject areas

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

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