Preparation and tribological characterization of amorphous carbon nitride coatings in a RF PECVD-DC PVD hybrid coating process

Pengfei Wang, Takanori Takeno, Koshi Adachi, Hiroyuki Miki, Toshiyuki Takagi

Research output: Contribution to journalArticlepeer-review

15 Citations (Scopus)

Abstract

Amorphous carbon nitride (CN x ) coatings were prepared on Si (100) substrates using a unique hybrid coating process with the combination of radio frequency plasma enhanced chemical vapor deposition (RF PECVD) and DC magnetron co-sputtering of graphite target at different N 2 /Ar flow ratios. The structural properties (i.e. deposition rate, composition and bonding structure, residual stress, hardness, and surface morphology) of those CN x coatings were greatly affected by the N 2 /Ar flow ratio. However, the friction behaviors of the CN x coatings in air and N 2 gas stream showed less dependency on the N 2 /Ar flow ratio. The friction coefficients of CN x coatings sliding against AISI 52100 pins in air and N 2 gas stream were in the ranges of 0.17-0.19 and 0.33-0.42, respectively. The analyses of the worn surfaces from optical microscopy and Raman spectroscopy suggested that the friction behaviors of the CN x coatings are mainly controlled by the tribo-films on the pin surfaces other than the composition and bonding structure of the coatings. Specifically, the moderate friction coefficients (0.17-0.19) in air are attributed to the formation of a polymer-like carbon tribo-film, whereas the high friction coefficients (0.33-0.42) in N 2 gas stream are due to the directly sliding between CN x coating and steel pin surface.

Original languageEnglish
Pages (from-to)6576-6582
Number of pages7
JournalApplied Surface Science
Volume258
Issue number17
DOIs
Publication statusPublished - 2012 Jun 15

Keywords

  • Carbon nitride
  • Friction
  • PECVD
  • PVD
  • Tribo-film

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Physics and Astronomy(all)
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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